The University of Iowa

MATFab Facility (e)


The Materials Analysis, Testing, and Fabrication (MATFab) Facility brings together cutting-edge instruments for the physical sciences and engineering that were formerly housed in the UI Microfabrication Facility and Central Microscopy Research Facility into one convenient location on campus. The MATFab Facility is managed by the Iowa Center for Research, Exploration, and Advanced Technology in Engineering and Sciences (Iowa CREATES).

The facility is housed on the ground level of IATL in the following rooms: 170, 172, 174, and 198. Christopher Cheatum, Associate Professor of Chemistry, serves as the MATFab Facility Director.

MATFab Facility

MATFab Facility

MATFab Facility


Lithography and NanoImprint

  • Electron Beam Nanolithography System
  • Nanonex NX1000 NanoImprint
  • OAI Mask Aligner Model 800

Thin-film deposition

  • Angstrom Engineerin 6-pocket E=Beam Evaporator
  • IntlVac - Nanochrom I Sputterer
  • Oxford Instruments - Atomic Layer Deposition (ALD) System - OpAL
  • Nanonex_Ultra

Plasma etching

  • Branson 3100 Plasma Cleaner
  • Oxford Instruments - PIE-ICP PlasmaPro 100 Cobra
  • Oxford Instruments RIE NGP80


Sample Preparation

  • VWR Vacuum Oven




To schedule equipment, visit the online reservation system.